Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process

Abstract

Optical ultrasound detection using microring resonators (MRRs) in a zero-change 45nm CMOS-SOI electronic-photonic platform with high intrinsic sensitivity of 39.6 f m/kPa and frequency response of 6MHz is reported.

Article

BibTeX

 @INPROCEEDINGS{zarkos2019cleo, 
    author={Zarkos, Panagiotis and Hsu, Olivia and Stojanović, Vladimir}, 
    booktitle={2019 Conference on Lasers and Electro-Optics (CLEO)}, 
    title={Ring Resonator Based Ultrasound Detection in a Zero-Change Advanced CMOS-SOI Process}, 
    year={2019}, 
    volume={}, 
    number={}, 
    pages={1-2}, 
    doi={10.1364/CLEO_AT.2019.JW2A.78} }